Transmission Electron Microscopy (TEM) images the structure of thin solid films by forcing monoenergetic electrons through the thin film, while detecting the transmitted electrons intensity. TEM specimens must be 200mn thick or thinner to allow sufficient electron transmission. Imaging the diffraction pattern of the transmitted electrons allows identification of crystal structure and lattice defects in the materials. TEM is typically used only when the highest resolution is required, because of the expensive equipment maintenance and involved sample preparation.
Sample / Technique Specifications
Destructive Preparation
Conductors
Coated Insulators
UHV Required
Extensive Sample Preparation
Polished Surface Required
Imaging Capabilities
2-Dimensionsal
Lateral Resolution: 0.1 - 0.3 nm
Structural / Chemical Information
Crystal Structure
Grain size
Lattice Parameter
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