The Scanning Electron Microscope (SEM) converts electrons that have been “bounced” of a sample surface into an image. SEM uses a tungsten wire (thermal emission source) or field emission source (FE-SEM) to generate electrons that are subsequently collimated and focused onto the sample. The spot is scanned quickly across the sample surface in a rectangular pattern and the signal from the surface is immediately converted into a visible image. SEM is typically used when an optical microscope will not suffice because of its limited depth of focus and limited magnification.
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Sample / Technique Specifications
Non-destructive
Conductors
Dielectrics must be coated with gold
Vacuum Required
Imaging Capabilities
2-Dimensionsal
Lateral Resolution: 15-45 nm (SEM), 1.5 nm (FE-SEM)
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